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SEM images of identical devices with 1 µm high structures and an outermost zone width of 100 nm. (a) no irradiation, (b) after 1,000 pulses, (c) after 10,000 pulses. Pulse power: 1.2 mJ, pulse rate: 60 Hz. The scale bars are 4 µm, the view angle is 45°.
