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. 2011 Aug 8;1:57. doi: 10.1038/srep00057

Figure 3. Improving the diffraction efficiency of diamond-based Fresnel zone plates.

Figure 3

(a) Overview of the fabrication flow, comprising electron-beam lithography (EBL) to pattern a resist layer, pattern transfer by plasma etching, and filling with Ir by atomic layer deposition (ALD). (b) Comparison of a diamond test FZP with 1.2 µm high structures and 100 nm wide outermost zones before and after filling with Ir by atomic layer deposition. The scale bars are 1 µm. (c) Photon energy dependent diffraction efficiencies of a diamond FZP with 1.8 µm high structures and a Ir-filled diamond FZP with 1.2 µm high structures. The solid lines show theoretical efficiency of FZPs made from these materials with the corresponding structure dimensions.