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Representative nanoindentation load-displacement curve for 500 nm indent. Berkovich diamond tip loaded into the surface at a target strain rate of 0.05 s−1 to 500 nm depth. Tip was held at maximum load for 10 seconds, unloaded and held at 10% of maximum load for 100 seconds to calculate thermal drift. Elastic modulus and contact hardness were calculated from the unloading portion of the curve.
