Table 1.

Summary of the effects of hydroxylation and amination surface functionalization techniques on microtoroid surfaces.

	O2Plasma Etch	Piranha Etch
Organic Solvent Deposition	Uneven coating of amine layer No structural damage	Water droplets on surface Structural damage from high temperatures used to remove accumulated surface water Clumping of amine layer
Vapor Deposition	No structural damage No water droplets on surface Uniform coating of amine layer No clumping visible	Water droplets on surface Structural damage from high temperatures used to remove accumulated surface water Clumping present to a lesser degree than organic solvent deposition