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(a) Schematic of the FEBID process. The precursor gas is introduced via a gas injection system in close proximity to the focus of the electron beam. The electron beam dissociates the precursor molecules forming the nano-granular deposit; (b) SEM image of the experimental setup showing cantilever, gas injection capillary (right), and nanomanipulator needle (left); (c) SEM image of deposited sensor structure on the cantilever.
