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3D-schematics of the cantilever chip used for strain sensor measurements. The cantilever dimensions are length: 500 μm, width: 70 μm, height: 10 μm. The strain sensors are deposited between the Au/Cr-contacts across the bending edge. The inset displays a SEM image of the substrate for two Pt-deposits, one serving as the strain sensor and one for reference.
