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. 2010 Nov 2;10(11):9847–9856. doi: 10.3390/s101109847

Figure 3.

Figure 3.

Top: Exemplary I(V)-characteristic for deposited strain sensor; Bottom: Exemplary ΔR/R vs. cantilever deflection curve used for measuring the deflection sensitivity. One deflection step corresponds to a deflection of the cantilever of 164 nm.