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(a) 2nd photolighography & TEOS etch. (b) 1st DRIE. (c) 2nd DRIE. (d) Thermal oxidation & bottom etch. (e) 3rd DRIE. (f) Anisotropic wet etching. (g) Thinner TEOS etch & 4th DRIE. (h) Passivation layer removal. The ESBM fabrication process flow.
