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. 2010 Jul 9;10(7):6623–6661. doi: 10.3390/s100706623

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© 2010 by the authors licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 4. — Schematic diagrams of the MEMS-based 3D MFFD using three layers of SU-8 resist for formation of (a) single emulsions and (b) double emulsions. (c) SEM images of the 3D MFFD for formation of single emulsions with inset showing the flow-focusing orifice with dimensions of 50 μm(W) × 50 μm(H). (d) SEM image of the 3D MFFD configuration for formation of double emulsions. The inner fluid orifice measuring 100 μm(W) × 50μm(H) × 100 μm(L) and the flow-focusing orifice measuring 200 μm(W) × 50 μm(H) × 100 μm(L) are coaxial, separated by a distance of 200 μm. The total height of the microchannels is 250 μm. (reprinted with permission from ref. 85, Copyright 2006, IOP).