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(a) The schematic diagram of the composite ZnMgO–Zn target. (b) The UV–visible absorption spectra of Zn1−xMgxO films with different x values. (c) The typical I–V characteristics of the Zn0.6Mg0.4O film based MSM detector (d) The spectral response of the Zn0.6Mg0.4O UV detector with a 5 μm finger pitch biased at 6V. The inset shows the responsivity at 270 nm as a function of reverse bias [88].
