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The sensing properties of ISFETs with Si3N4, Ta2O5, and annealed Ta2O5 sensing membranes.
| pH sensitivity (mV/pH) | Hysteresis (6-2-6-12-6) (mV) | Hysteresis (6-12-6-2-6) (mV) | Drift coefficient (mV/h) | |
|---|---|---|---|---|
| Si3N4 | 51.1 | — | 5.1 | <1 mV/h |
| Ta2O5 | 51.8 | 15.2 | 6.3 | <1 mV/h |
| Ta2O5 (anneal) | 56.9 | 0.3 | 0.7 | <1 mV/h |
