Table 4.
Q factor, resonant frequency and frequency shift calculated from Figure 9.
| ɛs | 1.02 | 1.04 | 1.06 | 1.08 | 1.1 | |
|---|---|---|---|---|---|---|
| tm(μm) | ||||||
| 0 | Q | 16896 | 16914 | 16870 | 16868 | 16955 |
| fr(THz) | 198.250 | 198.244 | 198.238 | 198.231 | 198.225 | |
| Δfr(GHz) | 6.0 | 6.0 | 7.0 | 6.0 | ||
| 0.06 | Q | 15502 | 15503 | 15502 | 15501 | 16513 |
| fr(THz) | 198.320 | 198.295 | 198.270 | 198.246 | 198.222 | |
| Δfr(GHz) | 25.0 | 25.0 | 24.0 | 24.0 | ||
| 0.09 | Q | 16758 | 16885 | 16901 | 16890 | 16841 |
| fr(THz) | 198.413 | 198.363 | 198.314 | 198.265 | 198.215 | |
| Δfr(GHz) | 50.0 | 49.0 | 49.0 | 50.0 | ||
| 0.12 | Q | 17006 | 17049 | 16932 | 16915 | 16867 |
| fr(THz) | 198.600 | 198.501 | 198.401 | 198.301 | 198.201 | |
| Δfr(GHz) | 99.0 | 100.0 | 100.0 | 100.0 | ||
| 0.15 | Q | 17151 | 17067 | 17022 | 16914 | 16830 |
| fr(THz) | 198.983 | 198.781 | 198.577 | 198.373 | 198.168 | |
| Δfr(GHz) | 202.0 | 204.0 | 204.0 | 205.0 | ||
| 0.18 | Q | 17470 | 17393 | 17129 | 16948 | 16746 |
| fr(THz) | 199.772 | 199.357 | 198.939 | 198.517 | 198.092 | |
| Δfr(GHz) | 415.0 | 418.0 | 422.0 | 425.0 | ||