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. 2011 Jun 10;11(6):6257–6269. doi: 10.3390/s110606257

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© 2011 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 5. — (a–b) The top view SEM micrograph of a typical fabricated CMOS MEMS microphone and its associated CMOS circuit and MEMS layout; (c) the side view SEM micrograph of a fabricated microphone; and (d) the zoom-in side view micrograph to show the corrugated structure and the sensing gap.

Figure 5. — (a–b) The top view SEM micrograph of a typical fabricated CMOS MEMS microphone and its associated CMOS circuit and MEMS layout; (c) the side view SEM micrograph of a fabricated microphone; and (d) the zoom-in side view micrograph to show the corrugated structure and the sensing gap.