Table 1.

The important design parameters and dimensions of the microphone.

Diaphragm diameter	800 μm	Air hole diameter	20 μm
Diaphragm density	2,500 kg/m3	Air hole quantity	350
Diaphragm thickness	1.1 μm	Hole ratio	22%
Young’s module of diaphragm	21.2 GPa	Air density	1.8 kg/m3
Diaphragm stress	41.63 MPa	Viscosity of air	1.73 × 10−5 N-s/m2
Effective diameter of backplate	800 μm	Bias voltage	6 V
Backplate thickness	40 μm	Parasitic capacitor	0.7 pF
Initial air gap	4.2 μm