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. 2011 Aug 29;11(9):8395–8411. doi: 10.3390/s110908395

Figure 3.

Figure 3.

Figure 3.

(a) Schematic illustration of the fabrication process of ITO-glass microheater chip; (I) the mask with a desirable pattern was attached on a ITO-glass substrate and followed by print screening silver metal paste on it, (II) after removing the mask, the silver electrodes-patterned ITO-glass substrate was created, (III) a 15 μm-thick insulation layer was then screen-printed on the silver electrodes-patterned ITO-glass substrate, and (IV) the fabriacted ITO-glass microheater chip, and (b) A photograph of the ITO-glass microheater chip.