Table 1.
Order of the layers in the four sections of the microresonator type-A.
| Layer | Section 1 | Section 2 | Section 3 | Section 4 |
|---|---|---|---|---|
| Si | 1st | 1st | 1st | 1st |
| SiO2 | 2nd | 2nd | ||
| Ti | 3rd | 3rd | ||
| Pt | 4th | 4th | ||
| PZT | 5th | 5th | ||
| Cr | 6th | 6th | 2nd | |
| Au | 7th | 7th | 3rd | |
| Cr | 8th | 8th | ||
| SiO2 | 9th | 9th | ||
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