. 2011 Aug 25;11(9):8203–8226. doi: 10.3390/s110908203

Table 2.

Geometrical parameters of the layers used in the microresonator type-A.

Geometrical parameter	Dimension (μm)	Geometrical parameter	Dimension (μm)

L_S1 = L_S3	50	b_2S3 = b_3S4	130
L_S2	100	t_1S1 = t_1S2 = t_1S3 = t_1S4	5.0
L_S4	500	t_2S1 = t_2S2	0.40
b_1S1	140	t_3S1 = t_3S2	0.05
b_2S1	120	t_4S1 = t_4S2	0.25
b_3S1 = b_4S1 = b_5S1 = b_6S1	72	t_5S1 = t_5S2	1.0
b_7S1 = b_8S1 = b_9S1 = b_3S2	72	t_6S1 = t_6S2 = t_8S1 = t_8S2	0.03
b_4S2 = b_5S2 = b_6S2 = b_7S2	72	t_7S1 = t_7S2 = t_3S4	0.15
b_8S2 = b_9S2	72	t_9S1 = t_9S2	0.30
b_1S3 = b_1S4	150