Table 4.
Geometrical parameter | Dimension (μm) | Geometrical parameter | Dimension (μm) |
---|---|---|---|
LS1 | 80 | h1S1 = h1S2 = h1S3 = h1S4 | 5.25 |
LS2 | 6 | h2S1 = h2S2 | 0.40 |
LS3 | 14 | h3S1 | 0.05 |
LS4 | 100 | h4S1 | 0.25 |
b1S1 = b2S1 = b1S2 = b2S2 | 50 | h5S1 | 1.0 |
b3S1 = b4S1 = b5S1 = b6S1 | 38 | h6S1 = h8S1 = h2S4 | 0.03 |
b7S1 = b8S1 = b9S1 | 38 | h7S1 | 0.15 |
b2S4 = b3S4 | 44 | h9S1 | 0.30 |
b1S3 = b1S4 | 50 | h3S4 | 0.24 |