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. 2011 Aug 25;11(9):8203–8226. doi: 10.3390/s110908203

Table 4.

Geometrical parameters of the layers used in the microresonator type-B.

Geometrical parameter Dimension (μm) Geometrical parameter Dimension (μm)

LS1 80 h1S1 = h1S2 = h1S3 = h1S4 5.25
LS2 6 h2S1 = h2S2 0.40
LS3 14 h3S1 0.05
LS4 100 h4S1 0.25
b1S1 = b2S1 = b1S2 = b2S2 50 h5S1 1.0
b3S1 = b4S1 = b5S1 = b6S1 38 h6S1 = h8S1 = h2S4 0.03
b7S1 = b8S1 = b9S1 38 h7S1 0.15
b2S4 = b3S4 44 h9S1 0.30
b1S3 = b1S4 50 h3S4 0.24