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. 2011 Aug 25;11(9):8203–8226. doi: 10.3390/s110908203

Table 5.

Mechanical properties of the layers used in the microresonator type-A and microresonator type-B.

Layer Young’s modulus (GPa) Density (kg·m−3) Poisson ratio
Si 130 2330 0.28
SiO2 73 2200 0.17
Ti 110 4510 0.32
Pt 168 21,400 0.39
PZT 63 7500 0.36
Cr 140 7190 0.21
Au 75 19,300 0.42