Table 1.

Comparison of sensitivity for different capacitive humidity sensors using polyimide presented in the literature.

Reference	Best sensitivity
Gu et al. [11]	5 fF%RH−1
Kim et al. [12]	0.78 pF%RH−1
Kim et al. [13]	0.35 pF%RH−1
This study	0.83 pF%RH−1