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Typical CMOS Layers Thickness in the ON 0.5 μm Technology Used.
| Layers | Thickness (μm) |
|---|---|
| Single Crystal Silicon (SCS) | ∼250 |
| Field Oxide under Poly, Hox | 0.4 |
| Field Oxide under Metal 1 | 0.375 |
| Gate Oxide | 0.0135 |
| Polysilicon, tpoly | 0.35 |
| Metal, HAl | 0.77 |
| Boron-phosphorus-silicate-glass (BPSG) | 0.7 |
