Table 3.

Calculated Thermal Resistances and Capacitances.

Symbol	Description	Values
Apoly	Area of the Polysilicon resistor	5.93 × 10−11 m2
Aox	Area of the Polysilicon resistor	1.37 × 10−10 m2
WAl	Area of the oxide	13.4 × 10−6 m
LAl	Width of the metal	10.2 × 10−6 m
RTpoly	Thermal resistance of polysilicon layer	233 K/W
RTSiO2	Thermal resistance of silicon dioxide layer	1.2 × 104 K/W
RTAl	Thermal resistance of aluminum layer	4.6 × 103 K/W
CTpoly	Thermal capacitance of polysilicon layer	3.88 × 10−11 J/K
CTSiO2	Thermal capacitance of silicon dioxide layer	3.80 × 10−10 J/K
CTAl	Thermal capacitance of aluminum layer	2.32 × 10−10 J/K
RT	Total thermal resistance	1.7 × 104 K/W
CT	Total thermal capacitance	3.1 × 10−11 J/K