Table 4.

Summary of the merits of the demonstrated device and comparisons with the device demonstrated in Reference [10].

Specifications	This work	Device in Reference [10]
Proof mass	230 μg	0.96 μg
Cantilever beam length	200 μm	500 μm
Proof mass size	500 μm × 500 μm	280 μm × 280 μm
Sensitivity	∼77 μV/g	∼2.0 μV/g
Power consumption	1.5 mW	N/A
Fabrication process	DRIE and RIE	Front side wet bulk micromachining
Process tolerance	Good	Need front side protection
Structure curling	Mediocre	Large