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. 2011 Aug 11;11(8):7892–7907. doi: 10.3390/s110807892

Table 4.

Summary of the merits of the demonstrated device and comparisons with the device demonstrated in Reference [10].

Specifications This work Device in Reference [10]
Proof mass 230 μg 0.96 μg
Cantilever beam length 200 μm 500 μm
Proof mass size 500 μm × 500 μm 280 μm × 280 μm
Sensitivity ∼77 μV/g ∼2.0 μV/g
Power consumption 1.5 mW N/A
Fabrication process DRIE and RIE Front side wet bulk micromachining
Process tolerance Good Need front side protection
Structure curling Mediocre Large