Table 4.
Summary of the merits of the demonstrated device and comparisons with the device demonstrated in Reference [10].
Specifications | This work | Device in Reference [10] |
---|---|---|
Proof mass | 230 μg | 0.96 μg |
Cantilever beam length | 200 μm | 500 μm |
Proof mass size | 500 μm × 500 μm | 280 μm × 280 μm |
Sensitivity | ∼77 μV/g | ∼2.0 μV/g |
Power consumption | 1.5 mW | N/A |
Fabrication process | DRIE and RIE | Front side wet bulk micromachining |
Process tolerance | Good | Need front side protection |
Structure curling | Mediocre | Large |