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. Author manuscript; available in PMC: 2011 Dec 19.
Published in final edited form as: IEEE J Sel Top Quantum Electron. 2010 Jul;16(4):804–814. doi: 10.1109/JSTQE.2009.2032785

Fig. 6. Frequency response of MEMS mirror shows resonant peaks at 0.5 kHz (outer axis) and 2.9 kHz (inner axis) to achieve real time operation.

Fig. 6