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. Author manuscript; available in PMC: 2011 Dec 19.
Published in final edited form as: IEEE J Sel Top Quantum Electron. 2010 Jul;16(4):804–814. doi: 10.1109/JSTQE.2009.2032785

Fig. 7. Miniature dual axes scanhead. Two collimated beams that are focused by a parabolic mirror at angle θ to the z-axis for en face scanning by the 2D MEMS mirror. The solid-immersion lens (SIL) minimizes aberrations to the incident beams.

Fig. 7