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. Author manuscript; available in PMC: 2011 Dec 19.
Published in final edited form as: IEEE J Sel Top Quantum Electron. 2010 Jul;16(4):804–814. doi: 10.1109/JSTQE.2009.2032785

Fig. 8. Alignment and assembly of dual axes scanhead. a) Precision machined v-grooves and Risley prisms provide coarse and fine alignment, respectively, of the two beams. b) Axial (z-axis) displacement of the MEMS chip is made with a slider mechanism.

Fig. 8