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Ellipsometric thickness data of the G1 and G2 aminosilane layers, prepared at 70 °C for 24 h in the vapor phase, before and after exposure to water for 24 h at 40 °C.
| Initial (Å) | After hydrolysis (Å) | ||
|---|---|---|---|
| G1 | APTES | 6 ± 1 | 3 ± 1 |
| APTMS | 13 ± 9 | 9 ± 5 | |
|
| |||
| G2 | AEAPTES | 5 ± 1 | 2 ± 1 |
| AEAPTMS | 19 ± 17 | 4 ± 1 | |
