Table 1.
Thickness and thermal conductivity of the materials.
| Material | Thickness (μm) | Thermal conductivity (pW/μm-K) |
|---|---|---|
| Al | 0.6 | 2.36 × 108 |
| SiO2 | 5 | 1.42 × 106 |
| Polysilicon | 0.3 | 3.2 × 107 |
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