. Author manuscript; available in PMC: 2012 Jun 5.

Published in final edited form as: Sens Actuators A Phys. 2011 Jun 5;2011:1570–1573. doi: 10.1016/j.sna.2011.11.009

Table 1.

Oxide Furnace Parameter

	Temperature (°C)	Hold time (min)	Ramp rate(°C /min)	Target Temperature	O₂
Temperature ramp up	20	XXX	10	1100°C	close
Dwell	1100°C	140	XXX	XXX	10 slpm
Temperature ramp down	1100°C	XXX	10	20	close