U11	U22	U33	U12	U13	U23
Cl1	0.1051 (7)	0.0521 (5)	0.0969 (7)	0.0157 (5)	0.0274 (6)	0.0134 (4)
O1	0.0881 (14)	0.0572 (11)	0.0272 (8)	0.0154 (10)	0.0261 (9)	0.0084 (8)
O2	0.0624 (12)	0.0562 (11)	0.0360 (9)	0.0213 (9)	0.0146 (8)	−0.0016 (8)
O3	0.0820 (14)	0.0817 (14)	0.0224 (8)	0.0345 (12)	0.0139 (8)	0.0076 (8)
N1	0.0404 (11)	0.0505 (12)	0.0244 (8)	0.0010 (9)	0.0141 (8)	−0.0046 (8)
N2	0.0438 (11)	0.0479 (11)	0.0217 (8)	0.0006 (9)	0.0140 (8)	−0.0011 (8)
C1	0.0379 (14)	0.0438 (14)	0.0619 (16)	−0.0085 (11)	0.0146 (12)	−0.0153 (12)
C2	0.0455 (16)	0.0534 (17)	0.093 (2)	−0.0089 (13)	0.0284 (16)	−0.0352 (17)
C3	0.0585 (19)	0.087 (2)	0.067 (2)	−0.0154 (17)	0.0349 (16)	−0.0362 (18)
C4	0.071 (2)	0.097 (3)	0.0449 (15)	0.0004 (19)	0.0279 (14)	−0.0074 (16)
C5	0.0568 (17)	0.0714 (19)	0.0414 (14)	0.0092 (14)	0.0212 (12)	−0.0046 (13)
C6	0.0311 (12)	0.0477 (13)	0.0384 (12)	−0.0053 (10)	0.0131 (9)	−0.0095 (10)
C7	0.0366 (12)	0.0455 (13)	0.0311 (11)	−0.0054 (11)	0.0114 (9)	−0.0022 (9)
C8	0.0394 (12)	0.0451 (13)	0.0240 (10)	0.0002 (10)	0.0129 (9)	−0.0016 (9)
C9	0.0368 (12)	0.0419 (12)	0.0209 (9)	−0.0035 (10)	0.0103 (8)	−0.0017 (8)
C10	0.0403 (13)	0.0412 (12)	0.0235 (9)	0.0004 (10)	0.0081 (9)	0.0006 (9)
C11	0.0406 (13)	0.0376 (12)	0.0290 (10)	−0.0009 (10)	0.0112 (9)	−0.0055 (9)
C12	0.0497 (14)	0.0474 (13)	0.0220 (9)	0.0015 (11)	0.0146 (9)	−0.0062 (9)
C13	0.0464 (13)	0.0481 (13)	0.0222 (10)	0.0042 (11)	0.0076 (9)	0.0001 (9)
C14	0.0464 (14)	0.0480 (13)	0.0257 (10)	0.0100 (11)	0.0124 (9)	−0.0005 (9)
O4	0.099 (2)	0.098 (2)	0.138 (3)	−0.0265 (18)	−0.0111 (19)	0.0009 (19)
O5	0.0685 (14)	0.0749 (14)	0.0616 (12)	0.0020 (11)	0.0063 (10)	0.0216 (11)