U11	U22	U33	U12	U13	U23
C1	0.0636 (17)	0.0482 (14)	0.0423 (14)	0.0019 (12)	−0.0016 (12)	−0.0008 (11)
C2	0.080 (2)	0.0534 (15)	0.0490 (16)	0.0019 (14)	0.0082 (14)	−0.0108 (13)
C3	0.0735 (19)	0.0484 (15)	0.0631 (18)	0.0056 (13)	0.0175 (15)	−0.0091 (13)
C4	0.0506 (15)	0.0421 (13)	0.0576 (17)	0.0043 (11)	0.0123 (13)	0.0015 (12)
C5	0.0403 (14)	0.0374 (12)	0.0488 (14)	0.0011 (10)	0.0075 (12)	0.0033 (11)
C6	0.0471 (15)	0.0389 (12)	0.0440 (14)	0.0024 (11)	0.0033 (11)	−0.0009 (11)
C7	0.0532 (16)	0.0408 (13)	0.0445 (15)	−0.0015 (11)	0.0015 (12)	−0.0058 (10)
C8	0.0510 (15)	0.0372 (12)	0.0431 (14)	0.0017 (11)	0.0035 (12)	−0.0031 (10)
C9	0.0464 (15)	0.0434 (13)	0.0485 (15)	0.0003 (11)	0.0028 (13)	0.0015 (11)
C10	0.0458 (15)	0.0342 (12)	0.0406 (13)	0.0014 (11)	0.0040 (11)	0.0066 (10)
C11	0.0483 (16)	0.0473 (14)	0.0643 (17)	0.0002 (12)	0.0109 (13)	0.0001 (12)
C12	0.0695 (19)	0.0521 (16)	0.084 (2)	0.0083 (14)	0.0271 (16)	−0.0052 (15)
C13	0.084 (2)	0.0468 (15)	0.0695 (19)	−0.0001 (16)	0.0127 (17)	−0.0128 (13)
C14	0.0613 (18)	0.0481 (15)	0.0678 (18)	−0.0107 (13)	0.0020 (14)	−0.0026 (13)
C15	0.0471 (16)	0.0444 (13)	0.0550 (16)	0.0025 (11)	0.0061 (13)	0.0017 (12)
C16	0.0505 (16)	0.0441 (14)	0.0505 (16)	0.0011 (12)	0.0037 (12)	0.0040 (12)
C17	0.069 (2)	0.0711 (17)	0.0429 (15)	0.0018 (15)	−0.0064 (14)	0.0072 (13)
C18	0.072 (2)	0.113 (2)	0.074 (2)	−0.0102 (18)	0.0051 (17)	0.0196 (18)
N1	0.0485 (12)	0.0381 (10)	0.0412 (11)	−0.0003 (9)	0.0027 (9)	−0.0013 (8)
O1	0.0645 (12)	0.0669 (12)	0.0635 (12)	0.0164 (9)	−0.0162 (10)	−0.0144 (9)
O2	0.0783 (13)	0.0639 (11)	0.0487 (11)	0.0165 (9)	−0.0083 (9)	−0.0023 (9)
O3	0.0722 (13)	0.0488 (10)	0.0679 (13)	0.0143 (9)	−0.0041 (10)	0.0056 (9)