U11	U22	U33	U12	U13	U23
S1	0.02171 (13)	0.01391 (12)	0.01645 (12)	0.00008 (11)	−0.00018 (9)	−0.00028 (11)
O1	0.0158 (4)	0.0132 (4)	0.0160 (4)	−0.0031 (3)	0.0023 (3)	−0.0005 (3)
O2	0.0180 (4)	0.0171 (4)	0.0219 (4)	0.0008 (3)	0.0073 (3)	0.0004 (3)
O3	0.0226 (4)	0.0306 (5)	0.0202 (4)	0.0000 (4)	0.0058 (3)	0.0053 (4)
O4	0.0152 (4)	0.0108 (4)	0.0315 (5)	−0.0018 (3)	−0.0023 (3)	0.0026 (3)
O5	0.0170 (4)	0.0158 (4)	0.0359 (5)	0.0016 (3)	0.0017 (4)	0.0043 (4)
C1	0.0144 (5)	0.0133 (5)	0.0176 (5)	0.0004 (4)	0.0019 (4)	−0.0003 (4)
C2	0.0163 (5)	0.0162 (5)	0.0224 (6)	0.0024 (4)	0.0045 (4)	−0.0037 (5)
C3	0.0150 (5)	0.0155 (6)	0.0272 (6)	0.0016 (4)	0.0017 (5)	−0.0048 (5)
C4	0.0138 (5)	0.0110 (5)	0.0246 (6)	−0.0011 (4)	−0.0002 (4)	0.0007 (4)
C5	0.0133 (5)	0.0129 (5)	0.0193 (5)	−0.0018 (4)	0.0009 (4)	0.0004 (4)
C6	0.0195 (5)	0.0122 (5)	0.0179 (5)	0.0013 (4)	−0.0019 (4)	0.0008 (4)
C7	0.0238 (6)	0.0216 (7)	0.0251 (6)	−0.0026 (5)	0.0036 (5)	0.0000 (5)
C8	0.0287 (7)	0.0194 (6)	0.0356 (8)	−0.0069 (5)	0.0003 (6)	−0.0004 (5)
C9	0.0284 (7)	0.0155 (6)	0.0324 (7)	0.0036 (5)	−0.0072 (5)	−0.0040 (5)
C10	0.0278 (7)	0.0223 (6)	0.0320 (7)	0.0045 (5)	0.0039 (5)	−0.0075 (5)
C11	0.0222 (6)	0.0174 (6)	0.0291 (7)	0.0003 (5)	0.0041 (5)	−0.0014 (5)
C12	0.0170 (5)	0.0125 (5)	0.0207 (5)	0.0004 (4)	0.0078 (4)	−0.0001 (4)
C13	0.0176 (5)	0.0154 (5)	0.0260 (5)	−0.0024 (5)	0.0047 (4)	−0.0003 (5)
C14	0.0187 (5)	0.0159 (6)	0.0252 (6)	0.0006 (4)	0.0064 (4)	0.0041 (5)
C15	0.0145 (5)	0.0276 (6)	0.0151 (5)	−0.0006 (5)	0.0007 (4)	−0.0026 (5)
C16	0.0234 (6)	0.0262 (7)	0.0210 (6)	0.0021 (5)	0.0044 (5)	−0.0042 (5)