U11	U22	U33	U12	U13	U23
Cl1	0.0766 (4)	0.0469 (3)	0.0478 (3)	0.0090 (3)	0.0306 (3)	−0.0059 (2)
Cl2	0.1009 (6)	0.0607 (4)	0.0620 (4)	−0.0197 (4)	0.0203 (4)	0.0207 (3)
S1	0.0393 (3)	0.0314 (3)	0.0382 (3)	−0.00622 (18)	0.0070 (2)	−0.00107 (18)
O1	0.0392 (8)	0.0546 (9)	0.0446 (8)	−0.0151 (6)	0.0059 (6)	0.0006 (7)
O2	0.0694 (11)	0.0308 (7)	0.0597 (10)	−0.0001 (7)	0.0167 (8)	−0.0068 (6)
N1	0.0357 (9)	0.0483 (10)	0.0374 (9)	−0.0037 (7)	0.0081 (7)	0.0039 (7)
C1	0.0316 (9)	0.0322 (9)	0.0332 (9)	−0.0036 (7)	0.0063 (7)	−0.0024 (7)
C2	0.0337 (9)	0.0357 (10)	0.0341 (9)	−0.0014 (8)	0.0082 (7)	−0.0040 (7)
C3	0.0422 (11)	0.0324 (10)	0.0451 (11)	−0.0033 (8)	0.0062 (9)	−0.0012 (8)
C4	0.0411 (11)	0.0447 (11)	0.0393 (10)	−0.0114 (9)	0.0035 (8)	0.0077 (9)
C5	0.0492 (12)	0.0544 (13)	0.0344 (10)	−0.0061 (10)	0.0134 (9)	−0.0029 (9)
C6	0.0444 (11)	0.0406 (11)	0.0383 (10)	−0.0020 (9)	0.0123 (8)	−0.0064 (8)
C7	0.0369 (10)	0.0346 (10)	0.0422 (10)	−0.0004 (8)	0.0049 (8)	0.0104 (8)
C8	0.0419 (11)	0.0406 (11)	0.0467 (12)	0.0004 (9)	0.0044 (9)	0.0049 (9)
C9	0.0465 (13)	0.0568 (14)	0.0572 (14)	−0.0022 (11)	−0.0044 (10)	0.0029 (11)
C10	0.0358 (12)	0.0689 (17)	0.0728 (17)	−0.0036 (11)	−0.0036 (11)	0.0097 (13)
C11	0.0374 (11)	0.0594 (14)	0.0655 (16)	0.0035 (10)	0.0117 (10)	0.0199 (12)
C12	0.0429 (12)	0.0516 (13)	0.0471 (12)	0.0007 (9)	0.0097 (9)	0.0080 (10)
C13	0.0644 (18)	0.106 (3)	0.077 (2)	−0.0030 (17)	−0.0139 (15)	−0.0246 (18)
C14	0.0469 (15)	0.100 (2)	0.087 (2)	0.0041 (14)	0.0234 (14)	0.0196 (18)