U11	U22	U33	U12	U13	U23
Cl1	0.03042 (19)	0.0318 (2)	0.01799 (17)	0.00371 (18)	−0.00209 (19)	−0.00441 (19)
O1	0.0202 (6)	0.0471 (9)	0.0279 (7)	−0.0040 (6)	0.0009 (5)	0.0086 (7)
O2	0.0261 (6)	0.0614 (10)	0.0289 (8)	−0.0008 (7)	−0.0046 (6)	0.0121 (8)
O3	0.0224 (6)	0.0755 (12)	0.0389 (9)	−0.0026 (7)	0.0008 (6)	0.0006 (8)
O4	0.0397 (8)	0.0547 (10)	0.0332 (8)	−0.0134 (8)	−0.0120 (7)	−0.0041 (7)
N1	0.0250 (7)	0.0365 (10)	0.0261 (8)	−0.0057 (7)	−0.0072 (6)	0.0073 (7)
N2	0.0203 (7)	0.0288 (8)	0.0298 (8)	0.0012 (6)	0.0013 (6)	0.0033 (7)
C1	0.0207 (8)	0.0200 (8)	0.0197 (8)	0.0023 (6)	0.0009 (6)	0.0028 (7)
C2	0.0249 (8)	0.0183 (8)	0.0148 (7)	0.0020 (7)	−0.0011 (6)	−0.0005 (6)
C3	0.0198 (7)	0.0256 (9)	0.0191 (8)	0.0023 (7)	0.0025 (6)	0.0032 (7)
C4	0.0205 (7)	0.0230 (8)	0.0222 (8)	−0.0011 (7)	−0.0039 (6)	0.0031 (7)
C5	0.0316 (9)	0.0224 (9)	0.0175 (8)	0.0014 (7)	−0.0028 (7)	0.0001 (7)
C6	0.0248 (8)	0.0253 (10)	0.0191 (8)	0.0010 (7)	0.0039 (6)	0.0010 (7)
C7	0.0225 (8)	0.0278 (10)	0.0209 (9)	0.0019 (7)	0.0005 (7)	0.0015 (7)
C8	0.0316 (9)	0.0298 (10)	0.0295 (10)	0.0043 (8)	0.0055 (8)	0.0010 (8)
C9	0.0392 (10)	0.0291 (10)	0.0254 (10)	−0.0019 (8)	−0.0026 (8)	−0.0027 (8)
C10	0.0264 (9)	0.0254 (9)	0.0309 (10)	−0.0042 (8)	−0.0049 (8)	0.0006 (8)
C11	0.0207 (7)	0.0193 (9)	0.0269 (9)	0.0014 (6)	−0.0015 (7)	0.0023 (7)
C12	0.0221 (8)	0.0240 (9)	0.0380 (11)	0.0002 (7)	0.0036 (7)	0.0029 (9)
C13	0.0356 (10)	0.0273 (10)	0.0337 (11)	0.0023 (8)	0.0104 (8)	0.0011 (8)
C14	0.0455 (11)	0.0268 (10)	0.0252 (9)	−0.0019 (9)	−0.0012 (9)	−0.0018 (8)
C15	0.0274 (9)	0.0285 (10)	0.0282 (10)	−0.0032 (8)	−0.0076 (7)	0.0032 (8)
C16	0.0214 (7)	0.0187 (8)	0.0248 (9)	0.0011 (6)	−0.0009 (6)	0.0029 (7)