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. 2010 Jun 1;10(6):5469–5502. doi: 10.3390/s100605469

Figure 24.

Figure 24.

(Left) Schematic illustrates the CVD reactor design used in the production of sensors using ElFi CVD. (Right) Example morphology of vanadium dioxide thin films grown on sensor substrates from the ElFi CVD reaction of vanadyl acetylacetonate at 525 °C with an applied AC electric field.