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. 2011 Nov 28;11(12):11206–11234. doi: 10.3390/s111211206

Figure 14.

Figure 14.

Electrostatic levitation displacement curves of the proof mass: (a) Curves for Z1, Z2, Z3 and X positions; (b) Curves for Z2, Z3, X and Y positions; (c) and (d) repetitions of levitation displacement curves of (a) and (b) after about two months.