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. 2011 Nov 28;11(12):11206–11234. doi: 10.3390/s111211206

Figure 8.

Figure 8.

Fabrication results of the top stator: (a) Microphotograph of one of the etched pits after removal of photoresist mask; (b) Photograph of partial wafer after Cr/Pt/Au layer deposited; (c) Photograph of one diced top stator, with SnAg electroplated within the pits.