Table 2.

Process conditions of SU-8 2100 (from MicroChem) with mold height of about 500 μm.

Process step	Parameters	Equipment
Spin-coating	Spread: 200 rpm ,15 s	Karl Suss RC8
	Spin: 700 rpm, 20 s
Soft bake	65 °C, 30 min; 95 °C, 120 min	Hotplate
Exposure	Dose 2.6 mW/cm2, 250 s	Karl Suss MA6
Post-expose bake	65 °C, 30 min; 90 °C, 40 min	convection oven
Development	40 min immersion in PGMEA
RIE cleaning	O2 35 sccm, pressure 5 Pa, 25 W, 300 s	Alcatel Nextral 100