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. 2009 Nov 18;9(11):9196–9215. doi: 10.3390/s91109196

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© 2009 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 3. — Formaldehyde sensor with integrated Pt micro-heater on a suspended silicon nitride structure, reprinted from [43] with the permission from Elsevier and on a suspended SiO₂/SiN_x/SiO₂ membrane, reprinted from [28] with permission from Elsevier.