Table 1.

Sputtering conditions of ZnS films

Parameter	Condition
Target	ZnS (99.99% pure)
Substrate	Corning E2000 glass
RF power	120 W
Sputtering gas	Pure argon (55 sccm)
Deposition time	20 min
Sputtering pressure	3 × 10-2 Torr
Substrate temperature	100°C, 200°C, 250°C, 300°C, 350°C, 400°C
Target to substrate distance	50 mm