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. Author manuscript; available in PMC: 2012 Feb 1.
Published in final edited form as: IEEE Trans Biomed Eng. 2011 Oct 18;59(2):346–354. doi: 10.1109/TBME.2011.2172440

Fig. 1.

Fig. 1

Shapes of the tips in silicon-based probes. (a) Scanning electron microscopic (SEM) of a 100-μm-thick tip of a probe after DRIE. The dotted line shows the approximate portion of the tip region to be ground out. (b) True 3-D tip, formed by mechanical grinding.