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. Author manuscript; available in PMC: 2012 Feb 1.
Published in final edited form as: IEEE Trans Biomed Eng. 2011 Oct 18;59(2):346–354. doi: 10.1109/TBME.2011.2172440

Fig. 2.

Fig. 2

Silicon-based microelectrode arrays developed at HMRI. (a) SEM view of a CN array with a total of four 100-μm-thick shanks and 16 electrode sites. (b) Enlarged view of the tip region of a probe shank showing the sharpened tip and electrode sites on the feature plane.