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Methods to Shape Probe Tips
| Grinding | Doped Etch-stop | Wet-Etching | |
|---|---|---|---|
| References | This article | [16, 17] | [18-20] |
| Fabrication | Easy | Difficult | Moderate |
| Wafer Orientation Requirement | No | No | Yes |
| Etching Mask needed | No | Yes | Yes |
| Etching Angles | Flexible; Independently controlled | Limited | Limited |
| Advantages | Economical. Any angle. | Batch process | Batch process |
| Disadvantages | Serial process | Requires dopant dosing | Fixed angle only; rough surface |
