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. 2009 Dec 16;9(12):10201–10216. doi: 10.3390/s91210201

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© 2009 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 1. — Schematic of: (a) generalized model of common electrostatic contact-type MEMS device operating in ambient air, (b) developed 2-D finite element model of impacting cantilever microstructure.