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Natural vibration modes of the cantilever microstructure: (a) flexural, (b) rotational. x0/l denotes ratio between the distance x0 from the anchor of the cantilever and its whole length l, Yij and Φij—maximum amplitudes of the flexural and rotational modes respectively: index i—number of vibration mode, j—sequence number of the maximum amplitude point with respect to the anchor point.
