Table 1.
Details of the FEA model.
| Structural Layer | Modeling Element | Model Input Properties [28] |
|---|---|---|
| Strained surface | Isotropic | E = 200 GPa |
| 20-node tetrahedral elements | ν = 0.33 | |
| Bonding layer | Isotropic | E = 1 Gpa |
| 20-node tetrahedral elements | ν = 0.35 | |
| Silicon carrier | Anisotropic | Elastic constants |
| 20-node tetrahedral elements | C11= 165.7 Gpa | |
| C12= 63.9 Gpa | ||
| C44= 79.6 Gpa | ||
| Piezoresistors | Anisotropic | Elastic constants |
| 20-node tetrahedral elements with piezoresistive behavior | C11= 165.7 Gpa | |
| C12= 63.9 Gpa | ||
| C44= 79.6 Gpa | ||
| Piezoresistive Coefficients | ||
| π11= 66 Tpa−1 | ||
| π12= −11 TPa−1 | ||
| π44= 1381 TPa−1 |