Table 3.

Standard deviation of the calculated sensor sensitivity at different operating temperatures depicted from Figure 24.

Doping Level (atoms/cm3)	Standard Deviation in Sensor Sensitivity (mV/με)
	−50 °C	−25 °C	0 °C	25 °C	50 °C
1 × 1018	1.51 × 10−03	3.17 × 10−06	4.40 × 10−06	1.48 × 10−03	1.41 × 10−03
5 × 1018	1.49 × 10−03	2.16 × 10−06	1.46 × 10−06	1.48 × 10−03	1.42 × 10−03
1 × 1019	1.44 × 10−03	5.99 × 10−06	4.04 × 10−06	6.08 × 10−04	5.93 × 10−04
5 × 1019	2.81 × 10−04	7.85 × 10−07	1.89 × 10−06	2.90 × 10−04	2.93 × 10−04
1 × 1020	3.08 × 10−04	4.20 × 10−06	6.93 × 10−07	3.09 × 10−04	3.01 × 10−04