Table 1.

The RMS deviations and the mean values.

	RMS deviation (μm)		mean (μm)
	F-P	M	F-P	M
Regular condition	0.0038	0.0096	0.010	0.037
Isolated condition	0.0021	0.0084	0.003	0.016
Airflow disturbance	0.0037	0.0134	0.016	0.071
Temperature variation	0.0085	0.0257	0.011	0.065