Table 3.
Samples for the PZT pyroelectric cells.
| PZT sample | Electrode type | Size (mm × mm) | Electrode width (W) | Etching depth (H) |
|---|---|---|---|---|
| 1 | Fully covered electrode | 38 × 38 | none | none |
| 2 | Mesh electrode with cavities | 38 × 38 | 100 μm | 15 μm |
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