U11	U22	U33	U12	U13	U23
S1	0.0417 (4)	0.0377 (4)	0.0452 (5)	0.0021 (4)	0.0305 (4)	0.0067 (4)
O1	0.0548 (15)	0.0607 (16)	0.0576 (15)	0.0012 (13)	0.0430 (13)	0.0104 (13)
O2	0.0550 (15)	0.0386 (13)	0.0570 (15)	0.0097 (11)	0.0356 (13)	0.0128 (12)
O3	0.0629 (16)	0.0654 (18)	0.0503 (15)	0.0271 (14)	0.0377 (13)	0.0125 (13)
N1	0.0318 (13)	0.0371 (15)	0.0427 (15)	−0.0028 (11)	0.0243 (12)	0.0012 (12)
N2	0.0305 (13)	0.0380 (14)	0.0324 (13)	0.0011 (11)	0.0169 (11)	0.0020 (11)
N3	0.0353 (13)	0.0373 (14)	0.0313 (13)	0.0017 (12)	0.0190 (11)	0.0019 (11)
C1	0.0288 (15)	0.0397 (18)	0.0354 (17)	0.0004 (14)	0.0144 (14)	0.0027 (14)
C2	0.0388 (18)	0.0427 (19)	0.0447 (19)	−0.0034 (15)	0.0160 (16)	−0.0040 (16)
C3	0.054 (2)	0.053 (2)	0.0355 (18)	0.0026 (18)	0.0183 (17)	−0.0076 (17)
C4	0.053 (2)	0.050 (2)	0.0370 (18)	0.0111 (17)	0.0275 (17)	0.0050 (16)
C5	0.0332 (16)	0.0378 (17)	0.0358 (16)	0.0070 (14)	0.0196 (14)	0.0080 (14)
C6	0.0265 (14)	0.0351 (16)	0.0311 (16)	0.0044 (12)	0.0143 (12)	0.0051 (13)
C7	0.0276 (14)	0.0348 (16)	0.0315 (15)	0.0022 (13)	0.0171 (13)	0.0034 (13)
C8	0.0322 (15)	0.0333 (16)	0.0350 (16)	−0.0010 (13)	0.0204 (13)	0.0001 (13)
C9	0.0341 (17)	0.047 (2)	0.059 (2)	0.0022 (16)	0.0292 (17)	0.0043 (18)
C10	0.0341 (16)	0.0352 (17)	0.0391 (17)	0.0011 (14)	0.0203 (14)	0.0011 (14)
C11	0.046 (2)	0.054 (2)	0.050 (2)	−0.0121 (18)	0.0240 (18)	−0.0155 (18)
C12	0.0428 (17)	0.0383 (17)	0.0343 (16)	0.0014 (15)	0.0241 (15)	−0.0009 (14)
C13	0.0324 (15)	0.0393 (17)	0.0348 (16)	0.0031 (14)	0.0179 (14)	−0.0005 (14)
C14	0.0312 (15)	0.0403 (17)	0.0320 (16)	−0.0004 (14)	0.0162 (13)	0.0009 (14)
C15	0.0458 (19)	0.050 (2)	0.0403 (18)	0.0174 (17)	0.0265 (16)	0.0124 (16)
C16	0.058 (2)	0.070 (3)	0.049 (2)	0.025 (2)	0.036 (2)	0.015 (2)
C17	0.0404 (18)	0.057 (2)	0.0380 (18)	0.0040 (17)	0.0223 (16)	0.0093 (17)
C18	0.0358 (16)	0.0367 (17)	0.0371 (17)	0.0002 (14)	0.0136 (14)	0.0045 (14)
C19	0.0362 (17)	0.0367 (18)	0.0411 (18)	0.0059 (14)	0.0202 (15)	0.0002 (14)